Abstract: in this paper, we reviewed the ceria based polishing powder preparation process and the result analysis, the selection of the wet solid phase mechanochemical method as the experimental method, and try to add NH4F as dopants to study the on the polishing powder morphology and particle diameter were investigated using SEM and XRD of sample morphology and particle size were characterized and analyzed. For the doping amount of NH4F were compared, obtained the Ce:F=1:0.4 for optimum adding amount, of polishing powder is spherical, particle size is about 30nm and purity can meet the purity (REO) is equal to or more than 92%. After determining the morphology of the polishing powder, the milling time is also analyzed, and the conclusion of the reaction of the 2H is concluded.. Because obtained after ball milling precursor to thermal decomposition, so the experiment of the precursor decomposition temperature was studied. After the experiment has been in 400 DEG C when the precursor is decomposed completely, with the rise of temperature, polishing powder particle trail began change. Experiments were carried out to add a variety of surfactants, and the results show that the dispersion of PEG4000 and NaCl is beneficial for improving the dispersion of the powders..
Keywords: CeO2 polishing powder; wet solid mechanical milling; thermal decomposition temperature; particle size; NH4F
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